TY - JOUR
AU - Peterson, Brennan
AB - Abstract.Guest Editors Erik Hosler and Brennan Peterson introduce the Special Section on Next Generation Light Source, Materials, and Metrology/Inspection Equipment.
TI - Special Section Guest Editorial: Next Generation Light Source, Materials, and Metrology/Inspection Equipment
JF - Journal of Micro/Nanopatterning, Materials, and Metrology
DO - 10.1117/1.jmm.21.2.021201
DA - 2022-04-01
UR - https://www.deepdyve.com/lp/spie/special-section-guest-editorial-next-generation-light-source-materials-0ZwwVCMSg1
SP - 021201
EP - 021201
VL - 21
IS - 2
DP - DeepDyve
ER -