TY - JOUR
AU - Himmer, Phillip A.
AB - Elliptical-boundary deformable mirrors have been developed for focus control of an optical beam incident at forty-five degrees with respect to the surface normal. The mirrors are silicon nitride membranes 1.4×1 mm in size, designed to accommodate a 1 mm diameter beam. Two electrostatic actuation zones provide control over spherical aberration. Focal lengths ranging from infinity to 36 mm have been achieved, and the mirror surface figure has been characterized to quantify aberration. Residual aberrations have been observed to be less than ॕ/5 (peak to peak) measured at ॕ = 660 nm.
TI - Off-axis variable focus and aberration control mirrors
JF - Proceedings of SPIE
DO - 10.1117/12.477815
DA - 2003-01-21
UR - https://www.deepdyve.com/lp/spie/off-axis-variable-focus-and-aberration-control-mirrors-0UreUrzx6e
SP - 296
EP - 303
VL - 4983
IS - 1
DP - DeepDyve
ER -