TY - JOUR
AU - Juncar, Patrick
AB - We propose a sub-nanometric positioning control method for piezoelectric actuators based on a home-made high frequency phase shifting electronic circuit and a heterodyne interferometer. The method has been set up. Using a readily available piezoelectric actuator, we demonstrate that our method allows back and forth displacement without nonlinearities. Repeatability of 0.053 nm has been obtained over 1 µm displacement range. Displacement steps as low as 260 pm are presented. Such a method could be very useful for the nanotechnology and nanometrology communities for nano-scale manipulations or nano-assembly applications.
TI - Highly accurate positioning control method for piezoelectric actuators based on phase-shifting optoelectronics
JF - Measurement Science and Technology
DO - 10.1088/0957-0233/16/9/008
DA - 2005-09-01
UR - https://www.deepdyve.com/lp/iop-publishing/highly-accurate-positioning-control-method-for-piezoelectric-actuators-0SuVdi0MSW
SP - 1771
VL - 16
IS - 9
DP - DeepDyve
ER -