TY - JOUR
AU - Minaev, N V
AB - The article demonstrates the fundamental possibility of creating microstructures for various functional purposes using the capabilities of the two-photon femtosecond polymerization method. The developed technological approach for creating a micro-optical holder for standard single-mode and multimode fibers is demonstrated. This type of holder can be used to manufacture a unit for optical matching of optical fibers with sensitive optical elements. The possibility of optical matching of fibers with a superconducting single-photon detector, an array system of bolometric superconducting microbridges, and spherical self-formed microlenses by near infrared-sensitive photopolymerization has been experimentally shown. The device manufacturing process was carried out in a combined single laser micromachining facility using femtosecond laser radiation for lithography with submicron resolution, texturing of the sensor surface, and the formation of microstructures for installing single-mode optical fibers.
TI - Fabrication of micro-optical connectors for electro-optical sensor devices by a combined femtosecond laser system
JF - Laser Physics Letters
DO - 10.1088/1612-202X/abdcc1
DA - 2021-02-06
UR - https://www.deepdyve.com/lp/iop-publishing/fabrication-of-micro-optical-connectors-for-electro-optical-sensor-0SaErGh70e
SP - 036201
VL - 18
IS - 3
DP - DeepDyve
ER -