%0 Journal Article
%T New fabrication method for micro-pyramidal vertical probe array for probe cards
%A Lin, Tsung-Hung
%A Yang, Hsiharng
%A Chao, Ching-Kong
%A Yeh, Mau-Shiun
%J Microsystem Technologies
%V 16
%N 7
%P 1215-1220
%@ 0946-7076
%D 2009-12-10
%I Springer-Verlag
%~ DeepDyve