%0 Journal Article
%T Stabilization Of Single Layer And Multilayer Resist Patterns To Aluminum Etching Environments
%A Matthews, John C.
%A Willmott, John I.
%J Proceedings of SPIE
%V 47
%P 194-202
%@ 0277-786X
%D 1984-06-29
%I SPIE
%~ DeepDyve