%0 Journal Article
%T Scatterometric characterization of diffractive optical elements
%A Saastamoinen, Toni
%A Husu, Hannu
%A Laukkanen, Janne
%A Siitonen, Samuli
%A Turunen, Jari
%A Lassila, Antti
%J Proceedings of SPIE
%V 9173
%P 91730I-91730I-4
%@ 0277-786X
%D 2014-08-27
%I SPIE
%~ DeepDyve