%0 Journal Article
%T Micromachined three-axis thermal accelerometer with a single composite heater
%A Bahari, Jamal
%A Leung, Albert M
%J Journal of Micromechanics and Microengineering
%V 21
%N 7
%P 13
%@ 0960-1317
%D 2011-07-01
%~ DeepDyve