%0 Journal Article
%T Change of an Internal Stress Exerted on Each Layer in AZO/Cu/Mo Multilayered Films on Annealing
%A Mukai, Kyohei
%A Hujita, Shingo
%A Takayama, Shinji
%J Journal of the Electrochemical Society
%V 169
%N 12
%P 8
%@ 0013-4651
%D 2022-12-01
%I IOP Publishing
%~ DeepDyve