%0 Journal Article
%T Electrolyte composition and galvanic corrosion for ruthenium/copper electrochemical mechanical polishing
%A Bian, Yan-Fei
%A Zhai, Wen-Jie
%A Cheng, Yuan-Yuan
%A Zhu, Bao-Quan
%J Rare Metals
%V 39
%N 11
%P 1300-1306
%@ 1001-0521
%D 2020-12-01
%I Nonferrous Metals Society of China
%~ DeepDyve