%0 Journal Article
%T Optimization of an optical disk manufacturing process for polymer microfluidic substrates by using the design of experiment methodology
%A Wu, Chun-Han
%A Hsu, Wen-Syang
%A Fan, Kuo-Wei
%A Lin, Yu-Cheng
%J Journal of Micro/Nanolithography, MEMS and MOEMS
%V 9
%N 3
%P 031011-031011-
%@ 1932-5150
%D 2010-07-01
%I SPIE
%~ DeepDyve