%0 Journal Article
%T Materials Processing Using an Atmospheric Pressure, RF‐Generated Plasma Source
%A Selwyn, G.S.
%A Herrmann, H.W.
%A Park, J.
%A Henins, I.
%J Contributions to Plasma Physics
%V 41
%N 6
%P 610-619
%@ 0863-1042
%D 2001-11-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve