%0 Journal Article
%T Comparison of simulated and experimental CD-limited yield for a submicron i-line process
%A Charrier, Edward W.
%A Progler, Christopher J.
%A Mack, Chris A.
%J Proceedings of SPIE
%V 2635
%N 1
%P 84-94
%@ 0277-786X
%D 1995-09-22
%I SPIE
%~ DeepDyve