%0 Journal Article
%T Design, modelling and FEM-based validation of composite membrane circular cMUT cell
%A Gupta, Shuvam
%A Kothari, Prateek
%A Sharma, Rishi
%A Mukhiya, Ravindra
%J Microsystem Technologies
%V 29
%N 11
%P 1589-1600
%@ 0946-7076
%D 2023-11-01
%I Springer Berlin Heidelberg
%~ DeepDyve