%0 Journal Article
%T SPARC: a novel technology for depositing conformal dielectric thin films with compositional tuning for etch selectivity
%A Varadarajan, Bhadri
%J Proceedings of SPIE
%V 10963
%P 1096307-1096307-13
%@ 0277-786X
%D 2019-03-20
%I SPIE
%~ DeepDyve