%0 Journal Article
%T Applications of Electrochemistry to Fabrication of Semiconductor Devices
%A Schnable, G. L.
%A Schmidt, P. F.
%J Journal of the Electrochemical Society
%V 123
%N 9
%P 310C-315C
%@ 0013-4651
%D 1976-09-01
%~ DeepDyve