%0 Journal Article
%T A study of multi-angles knife-edge method applied to digital modulation transfer function measurement
%A Fang, Yi-Chin
%A Tsay, Ho-Lin
%J Microsystem Technologies
%V 27
%N 4
%P 1429-1437
%@ 0946-7076
%D 2019-02-13
%I Springer Berlin Heidelberg
%~ DeepDyve