%0 Journal Article %T Large-aperture MOEMS Fabry-Perot interferometer for miniaturized spectral imagers %A Rissanen, Anna %A Langner, Andreas %A Viherkanto, Kai %A Mannila, Rami %J Proceedings of SPIE %V 9375 %P 93750J-93750J-8 %@ 0277-786X %D 2015-02-27 %I SPIE %~ DeepDyve