%0 Journal Article
%T Foundry compatible, efficient wafer-scale manufacturing of ultra-low loss, high-density Si$_3$N$_4$ photonic integrated circuits
%A Ji, Xinru
%A Wang, Rui Ning
%A Liu, Yang
%A Riemensberger, Johann
%A Qiu, Zheru
%A Kippenberg, Tobias J.
%J Physics
%V 2024
%N 2406
%D 2024-06-20
%~ DeepDyve