%0 Journal Article
%T A review: wafer bonding of Si-based semiconductors
%A Ke, Shaoying
%A Li, Dongke
%A Chen, Songyan
%J Journal of Physics D: Applied Physics
%V 53
%N 32
%P 38
%@ 0022-3727
%D 2020-08-05
%~ DeepDyve