%0 Journal Article
%T Chemomechanical polishing methods and surface metrology of cadmium zinc telluride substrates suitable for IRFPA production
%A Sheahan, T.
%A Martinez, B.
%A Cooper, M. D.
%A Mackenzie, J.
%A Burgess, L.
%A Kumar, F. J.
%A Furlong, M. J.
%J Proceedings of SPIE
%V 11002
%P 110020P-110020P-7
%@ 0277-786X
%D 2019-05-14
%I SPIE
%~ DeepDyve