%0 Journal Article %T A Lithium‐Silicon Microbattery with Anode and Housing Directly Made from Semiconductor Grade Monocrystalline Si %A Sternad, Michael %A Hirtler, Georg %A Sorger, Michael %A Knez, Daniel %A Karlovsky, Kamil %A Forster, Magdalena %A Wilkening, H. Martin R. %J Advanced Materials Technologies %V 7 %N 3 %D 2022-03-01 %I Wiley Subscription Services, Inc., A Wiley Company %~ DeepDyve