%0 Journal Article
%T Application of probe manipulator to repair probe cards
%A Konno, Takeshi
%A Machida, Kazumichi
%J Proceedings of SPIE
%V 6172
%N 1
%P 61720T-61720T-8
%@ 0277-786X
%D 2006-03-16
%I SPIE
%~ DeepDyve