%0 Journal Article
%T Piezoelectric Thick Film Deposition via Powder/Granule Spray in Vacuum: A Review
%A Patil, Deepak  Rajaram
%A Annapureddy, Venkateswarlu
%A Kaarthik, J.
%A Thakre, Atul
%A Akedo, Jun
%A Ryu, Jungho
%J Actuators
%V 9
%N 3
%@ 2076-0825
%D 2020-07-23
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve