%0 Journal Article
%T A flexible deep learning based approach for SEM image denoising
%A Chen, Jun
%A Jang, Xinheng
%A Goto, Keisuke
%A Tsutsumi, Takashi
%A Toyoda, Yasutaka
%J Proceedings of SPIE
%V 12955
%P 129550B-129550B-8
%@ 0277-786X
%D 2024-04-10
%I SPIE
%~ DeepDyve