%0 Journal Article
%T Selective metal passivation by vapor-dosed phosphonic acid inhibitors for area-selective atomic layer deposition of SiO2 thin films
%A Lee, Jeong-Min
%A Lee, Seo-Hyun
%A Lee, Ji Hun
%A Kwak, Junghun
%A Lee, Jinhee
%A Kim, Woo-Hee
%J Nano Convergence
%V 12
%N 1
%D 2025-05-30
%I Springer Nature Singapore
%~ DeepDyve