%0 Journal Article
%T Atomistic Simulation of Physical Vapor Deposition of Optical Thin Films
%A Grigoriev, Fedor Vasilievich
%A Sulimov, Vladimir Borisovich
%J Nanomaterials
%V 13
%N 11
%@ 2079-4991
%D 2023-05-24
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve