%0 Journal Article
%T A new electrical residual stress characterization using bent beam actuators
%A Seok, Seonho
%A Lee, Byeungleul
%A Chun, Kukjin
%J Journal of Micromechanics and Microengineering
%V 12
%N 5
%@ 0960-1317
%D 2002-09-01
%~ DeepDyve