%0 Journal Article %T Motion control of a magnetically levitated microrobot using magnetic flux measurement %A Mehrtash, Moein %A Khamesee, Mir %A Tsuda, Naoaki %A Chang, Jen-Yuan %J Microsystem Technologies %V 18 %N 10 %P 1417-1424 %@ 0946-7076 %D 2012-06-20 %I Springer-Verlag %~ DeepDyve