%0 Journal Article %T Specific features of chemical deposition of polytetrafluoroethylene films from hexafluoropropylene oxide %A Uvarov, A. %A Aleksandrov, S. %J Russian Journal of General Chemistry %V 83 %N 8 %P 1607-1612 %@ 1070-3632 %D 2013-09-17 %I Springer US %~ DeepDyve