%0 Journal Article
%T An Annular Mechanical Temperature Compensation Structure for Gas-Sealed Capacitive Pressure Sensor
%A Hao, Xiuchun
%A Jiang, Yonggang
%A Takao, Hidekuni
%A Maenaka, Kazusuke
%A Higuchi, Kohei
%A ,
%J Sensors
%@ 1424-8220
%D 2012-06-11
%I MDPI AG
%~ DeepDyve