%0 Journal Article
%T Three-dimensional profiling using a still shot
%A Kondiparthi, Mahesh
%A ,
%J Journal of Micro/Nanolithography, MEMS and MOEMS
%V 13
%N 1
%P 011106-011106
%@ 1932-5150
%D 2014-01-01
%I SPIE
%~ DeepDyve