%0 Journal Article
%T Dense Structure of SiNx Films Fabricated by Radical Beam Deposition Method Using Hexamethyldisilazane
%A Taguchi, Kohshi
%A Yoshimoto, Masahiro
%A Saraie, Junji
%A Chayahara, Akiyoshi
%A Horino, Yuji
%J Japanese Journal of Applied Physics
%V 43
%N 11A
%@ 0021-4922
%D 2004-11-01
%~ DeepDyve