%0 Journal Article
%T Interactive image annotation and AI-assisted segmentation of TEM images for automatic CD measurement
%A Kim, Dongok
%A Lee, Wonhee
%A Yim, Yeny
%A Cha, Byeongkyu
%A Park, Hansaem
%A Shon, Subong
%A Lee, Myungjun
%J Proceedings of SPIE
%V 12955
%P 129550Y-129550Y-10
%@ 0277-786X
%D 2024-04-10
%I SPIE
%~ DeepDyve