%0 Journal Article
%T Formation of TiN/CoSi 2 bilayer from Co/Ti/Si structure in a non-isothermal reactor
%A Rudakov, Valery I.
%J Proceedings of SPIE
%V 7025
%N 1
%P 70250X-70250X-8
%@ 0277-786X
%D 2008-03-03
%I SPIE
%~ DeepDyve