%0 Journal Article
%T Interfacial and Electrical Properties of Ge MOS Capacitor by ZrLaON Passivation Layer and Fluorine Incorporation
%A Huang, Yong
%A Xu, Jing-Ping
%A Liu, Lu
%A Cheng, Zhi-Xiang
%A Lai, Pui-To
%A Tang, Wing-Man
%J IOP Conference Series: Materials Science and Engineering
%V 229
%N 1
%P 7
%@ 1757-8981
%D 2017-09-01
%~ DeepDyve