%0 Journal Article
%T Electrostatic chucking and EUVL mask flatness analysis
%A Nataraju, M.
%J Proceedings of SPIE
%V 5992
%N 1
%P 59923S-59923S-8
%@ 0277-786X
%D 2005-10-21
%I SPIE
%~ DeepDyve