%0 Journal Article %T Evaluation of extremely thin polycrystalline germanium films and their TFT performance fabricated at 400 °C by Cu-induced crystallization on a glass substrate %A Suzuki, Sho %A Hara, Akito %J Japanese Journal of Applied Physics %V 63 %N 5 %P 7 %@ 0021-4922 %D 2024-05-01 %I IOP Publishing %~ DeepDyve