%0 Journal Article
%T Design and analysis of a novel piezoelectric inertial actuator with large stepping displacement amplified by compliant mechanism
%A Sun, Xiaoqing
%A Wang, Ju
%A Yi, Sicheng
%A Hu, Wei
%J Microsystem Technologies
%V 28
%N 4
%P 1025-1035
%@ 0946-7076
%D 2022-04-01
%I Springer Berlin Heidelberg
%~ DeepDyve