%0 Journal Article
%T Laser damage of calcium fluoride by ArF excimer laser irradiation
%A Azumi, M.
%A Nakahata, E.
%J Proceedings of SPIE
%V 9632
%P 963213-963213-7
%@ 0277-786X
%D 2015-11-23
%I SPIE
%~ DeepDyve