%0 Journal Article
%T An integrated approach to the analysis of imprint vs. optical lithography or why this is not just a mask discussion
%A Maltabes, John G.
%J Proceedings of SPIE
%V 5992
%N 1
%P 59924A-59924A-7
%@ 0277-786X
%D 2005-10-21
%I SPIE
%~ DeepDyve