%0 Journal Article
%T Ongoing development of ultrafast DUV pulse laser repair for EUV photomasks
%A Robinson, Tod
%A LeClaire, Jeff
%A Mochi, Iacopo
%A Nebling, Ricarda Maria
%A Ekinci, Yasin
%A Kazazis, Dimitrios
%J Proceedings of SPIE
%V 11908
%P 119080O-119080O-13
%@ 0277-786X
%D 2021-08-23
%I SPIE
%~ DeepDyve