%0 Journal Article
%T Chemically amplified resists based on the norbornene copolymers with steroid derivatives
%A Kim, Jin-Baek
%A Kim, Seong-Ju
%A Baik, Ki-Ho
%A Jung, Jae Chang
%J Proceedings of SPIE
%V 3678
%N 1
%P 36-43
%@ 0277-786X
%D 1999-06-11
%I SPIE
%~ DeepDyve