%0 Journal Article
%T Effect of Complexing Agents on Surface Composition for Co Post-CMP Cleaning Process
%A Byun, Jinuk
%A Bae, KiHo
%A Kwon, Ohsung
%A Myong, Kyong Kyu
%A Lim, Taeho
%A Kim, Jae Jeong
%J ECS Journal of Solid State Science and Technology
%V 10
%N 2
%P 5
%@ 2162-8769
%D 2021-02-26
%~ DeepDyve