%0 Journal Article
%T Optical measurement of the layer thickness of transparent materials
%A Dierke, H.
%A Tutsch, R.
%J Proceedings of SPIE
%V 8430
%N 1
%P 843008-843008-6
%@ 0277-786X
%D 2012-04-16
%I SPIE
%~ DeepDyve