%0 Journal Article
%T Real cell overlay measurement through design based metrology
%A Yoo, Gyun
%A Kim, Jungchan
%A Park, Chanha
%A Lee, Taehyeong
%A Ji, Sunkeun
%A Jo, Gyoyeon
%A Yang, Hyunjo
%A Yim, Donggyu
%A Yamamoto, Masahiro
%A Maruyama, Kotaro
%A Park, Byungjun
%J Proceedings of SPIE
%V 9050
%P 90501O-90501O-11
%@ 0277-786X
%D 2014-04-02
%I SPIE
%~ DeepDyve