%0 Journal Article
%T Si stencil masks for organic thin film transistor fabrication
%A Letzkus, Florian
%A Zaki, Tarek
%A Ante, Frederik
%A Richter, Harald
%A Burghartz, Joachim N.
%A Butschke, Jörg
%A Klauck, Hagen
%J Proceedings of SPIE
%V 8166
%N 1
%P 81662B-81662B-12
%@ 0277-786X
%D 2011-10-06
%I SPIE
%~ DeepDyve