%0 Journal Article
%T Planarization and edge bead reduction of spin-coated polydimethylsiloxane
%A Baëtens, Tiffany
%A Arscott, Steve
%J Journal of Micromechanics and Microengineering
%V 29
%N 11
%P 11
%@ 0960-1317
%D 2019-11-01
%~ DeepDyve