%0 Journal Article
%T Design of silicon box cleaning control system
%A Ge, Zhenghao
%A Yang, Hao
%A Li, Lixiang
%A Cai, Yongli
%J Journal of Physics Conference Series
%V 2787
%N 1
%P 9
%@ 1742-6588
%D 2024-06-01
%I IOP Publishing
%~ DeepDyve