%0 Journal Article
%T Novel multiple resist patterning stacks for dual-damascene interconnection and resolution-enhanced patterns
%A Huang, I-Hsiung
%A Huang, Jiunn-Ren
%A Cheng, Yi-Fang
%J Proceedings of SPIE
%V 4346
%N 1
%P 265-275
%@ 0277-786X
%D 2001-09-14
%I SPIE
%~ DeepDyve